Permittivity and loss characteristics of SU8-quartz composite photoresist at THz frequencies
Por:
Kim, JM, Llamas-Garro, I, Espinosa-Espinosa, MI, Ke, ML, Lancaster, M, de Melo, MT
Publicada:
1 ene 2016
Resumen:
An SU8-quartz composite photoresist has been fabricated and characterized from 1.2 to 1.4 THz; the material contains quartz particles from 0 to 50 wt%. The composite can reduce the inherent losses of SU8 photoresist at terahertz frequencies. Calculated and measured data is presented and compared with SU8 without quartz inclusions. The results show a reduction in losses and an increase in permittivity in the composite material as the density of quartz particles increases. This initial experiment proves the possibility of modifying the electrical parameters of SU8; increasing the quartz density of the composite will modify these parameters further at THz frequencies. © 2016 Wiley Periodicals, Inc. Microwave Opt Technol Lett 58:2329–2330, 2016. © 2016 Wiley Periodicals, Inc.
Filiaciones:
Kim, JM:
Chonbuk Natl Univ, 567 Baekje Daero, Jeonju Si 54896, Jeollabuk Do, South Korea
Llamas-Garro, I:
Parc Mediterrani Tecnol, Ctr Tecnol Telecomunicac Catalunya, Ave Carl Friedrich Gauss 7, Barcelona 08860, Spain
Espinosa-Espinosa, MI:
Parc Mediterrani Tecnol, Ctr Tecnol Telecomunicac Catalunya, Ave Carl Friedrich Gauss 7, Barcelona 08860, Spain
Ke, ML:
Dynex Semicond Ltd, Doddington Rd, Lincoln LN6 3LF, England
Lancaster, M:
Univ Birmingham, Sch Elect Elect & Comp Engn, Birmingham B15 2TT, W Midlands, England
de Melo, MT:
Univ Fed Pernambuco, Dept Eletron & Sistemas, Ave Acad Helio Ramos S-N, BR-50740530 Recife, PE, Brazil
Green Accepted, Green Published, All Open Access; Green Open Access
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